화학공학소재연구정보센터
Applied Surface Science, Vol.220, No.1-4, 193-202, 2003
Tantalum irradiation by high power pulsed laser at 1315 and 438 nm wavelengths
The high power pulsed laser Prague asterix laser system (PALS), operating at the fundamental (1omega) and third (3omega) harmonics (1315 and 438 nm wavelengths, respectively), is employed in a single-shot mode to irradiate tantalum targets in vacuum. The laser pulse width is 400 ps and the laser pulse energy ranges between 43 and 736 J at 1omega and between 12 and 230 J at 3omega. High ablation yields (0.1-0.6 mg per pulse) are measured as a function of the laser pulse energy at both wavelengths; at 438 nm higher etching rates are observed. The produced craters are analysed by the scanning electron microscope (SEM) and by the high sensitivity surface profiler system. They are investigated in dimension, shape and angle aperture as a function of the incident laser energy. Different possible mechanisms responsible for the different crater shapes are presented and discussed. (C) 2003 Elsevier B.V. All rights reserved.