Strontium zirconate perovskite thin films were deposited on Si(1 0 0) substrates by metal organic chemical vapour deposition (MOCVD) in a cold wall reactor using direct injection process of two beta-diketonates precursors. Oxide growth was observed over a temperature ranging from 700 to 1000 degreesC and various metal Sr/Zr ratios in the solution. Using peculiar experimental conditions, an orthorhombic strontium zirconate (SrZrO3(o)) phase is obtained. The results on the films are discussed in relation with the bulk ZrO2-SrO pseudo binary equilibrium phase diagram existing on this compound. (C) 2003 Elsevier B.V. All rights reserved.