Applied Surface Science, Vol.223, No.1-3, 196-199, 2004
Characterization of LiNb1-xTaxO3 composition-spread thin film by the scanning microwave microscope
Dielectric property of a composition-spread LiNb1-xTaxO3 thin film, fabricated by the combinatorial pulsed-laser deposition (PLD) method, was systematically characterized by the scanning microwave microscope (SmuM). Measured frequency shift showed a broad maximum around x = 0.2-0.5, and gradually decreased with x, resulting in a lower dielectric constant in the LiTaO3 side compared to the LiNbO3 side. The trend of frequency shift has been revealed to possess a strong correlation with the sharpness of XRD peak, suggesting that lowering of dielectric constant is principally brought about by the degradation of crystallinity. (C) 2003 Published by Elsevier B.V.
Keywords:scanning microwave microscope (S mu M);dielectric constant;composition-spread thin film;pulsed-laser deposition (PLD);high-throughput characterization;lithium niobate;lithium tantalate;concurrent X-ray diffraction