화학공학소재연구정보센터
Applied Surface Science, Vol.223, No.1-3, 224-228, 2004
Combinatorial pulsed laser deposition using a compact high-throughout thin-film deposition flange
We describe the design and operation of our high-throughput thin-film deposition flange which is used to perform combinatorial pulsed laser deposition (PLD). The portable flange allows us to "convert" different PLD systems into combinatorial PLD systems. The use of the flange is illustrated in fabrication of a discrete gas sensor library and an epitaxial composition spread. (C) 2003 Published by Elsevier B.V.