The derivatization, characterization, and micro-tribological behavior of an amine-terminated polymer surface were investigated. Thus, the heptafluorobutyric anhydride (HFBA) derivatized film was characterized by means of contact-angle measurement and X-ray photoelectron spectroscopy (XPS). It was found that the HFBA-derivatized film was generated on the PEI surface in the presence of a chemical amide bond. The tribological properties were characterized as well. The polymer PEI film had relative high adhesion, friction, and poor anti-wear ability, while the HFBA-derivatized polymer film possessed a very low adhesive force of only about 5.5 nN (a pyramidal Si3N4 tip with radius of curvature about 50 nm was used to measure the adhesion), which was more than an order of magnitude lower than that of the silicon substrate surface. Besides, the HFBA-derivatized film registered good friction-reducing ability and thermal stability. Thus, a good alternative method was presented to improve the tribological properties of polymer film by chemisorbing molecules with low surface energy. This makes it feasible for the derivatized polymer film to find promising application in resolving the tribological problems of micro-electromechanical systems (MEMS). (C) 2003 Elsevier B.V. All rights reserved.