In this study, TOF-SIMS was used to characterize lubricants used in magnetic recording media. Films of lubricants, perfluoropolyether (PFPE) Fomblin Z-DOL, Z-TETRAOL, AM3001, and cyclo triphosphazene X-1P were deposited on carbon overcoats of the magnetic disks from solutions. TOF-SIMS results showed that each thin film lubricant produces characteristic ions that are closely related to its chemical structure. Ratios of characteristic ions from the Z-DOL and carbon overcoat can be used to monitor the thickness and molecular weights of the lubricant. Molecular or molecule related ions have been observed for Z-DOL and X-1P. It was also found that the average mass of molecular ions correlates very well with the number average molecular weight determined by nuclear magnetic resonance (NMR) for Z-DOL. (C) 2004 Elsevier B.V. All rights reserved.