We have designed and tested two primary ion beam systems for the generation of polyatomic beams for high mass SIMS. These are a gold cluster ion gun and a C-60 ion gun. The two systems offer different performance benefits in terms of spatial resolution, mass range and ion yields. The gold system provides a general purpose tool with beams suitable for high spatial resolution and beams suitable for high mass range SIMS; the C-60 system provides outstanding ion yields, especially at high mass. We present results of sputter yield measurements for C-60 bombardment of silicon. These suggest that C60 sputters with very high efficiency. (C) 2004 Elsevier B.V. All rights reserved.