Cathodic electrodeposition of yttrium containing thin films was realised on TA6V substrates from a Y(NO3)(3) solution. Experimental conditions to obtain homogeneous and crack free thin films were determined. Subsequent thermal treatment led to an Y2O3 coating, expected to provide an increase of TA6V oxidation resistance at high temperatures. The steps occurring during the thermal treatment leading to Y2O3 were also investigated. (C) 2004 Elsevier B.V. All rights reserved.