Low-energy electron diffraction (LEED), Auger electron spectroscopy (AES), and depth profiling were used to study growth mode and structure in the interfaces of Ni/Ag/Pt(1 1 1). An atomic exchange occurs between Ni and Ag when the annealing temperature is high enough and the starting exchange temperature does not depend on the thickness of Ni. Nevertheless, the complete exchange temperature is higher when the coverage of Ni increases. Experimental evidence shows that the Ni-Pt alloy develops after the atomic exchange between Ag and Ni is complete. The atomic exchange between Ag and Ni, and the formation of Ni-Pt alloy were confirmed by the depth profile. The mechanisms of the atomic exchange are discussed. (C) 2004 Elsevier B.V. All rights reserved.