Hybrid titanium oxide thin films containing surfactants, sodium dodecyl benzylsulfonate and sodium dodecyl sulfate, have been prepared by a novel liquid-phase deposition method. It is a new attempt to prepare organic-inorganic hybrid thin film by this method which usually be applied in preparing metal oxide thin film before. The two kinds of surfactants/TiO2 hybrid thin films were characterized by means of FT-IR, SEM, XRD, fluorescence X-ray, ICP-AES and Raman spectroscopy, and showed noticeable differences in surface top view and particle diameter, cross-section image and thickness, deposited amount of Ti, XRD patterns and Raman shift. The reasons giving rise to above differences of the two kinds composite thin films has been discussed. The deposition mechanism of organic-inorganic hybrid thin film has been also presumed. The use of this processing parameter may open up a new way to the preparing of the organic-inorganic hybrid thin film. (C) 2004 Elsevier B.V. All rights reserved.