The surface morphology, surface roughness and micro-crack of AISI D2 tool steel machined by the electrical discharge machining (EDM) process were analyzed by means of the atomic force microscopy (AFM) technique. Experimental results indicate that the surface texture after EDM is determined by the discharge energy during processing. An excellent machined finish can be obtained by setting the machine parameters at a low pulse energy. The surface roughness and the depth of the micro-cracks were proportional to the power input. Furthermore, the AFM application yielded information about the depth of the micro-cracks is particularly important in the post treatment of AISI D2 tool steel machined by EDM. (c) 2004 Elsevier B.V. All rights reserved.