Wettability of solid surfaces with water is well-known to be governed by chemical properties and nanotextures of the surfaces. A proper nanotexture of surfaces enhances their hydrophobicity. In this study, a novel rnethod consisting of two dry process techniques, that is, nanotexturing by an oxygen plasma treatment and subsequent hydrophobic coating by means of low temperature chemical vapor deposition or plasma-enhanced chemical vapor deposition, was employed to form ultra water-repellent polymer sheets. A nanotexture was formed on a poly(ethylene terephthalate) substrate surface via selective oxygen plasma etching. This surface nanotexture remained after the hydrophobic coatings using organosilane precursors. The surface-modified substrate was transparent and ultra water-repellent, showing a water contact angle greater than 150 degrees. (c) 2004 Elsevier B.V. All rights reserved.