Tungsten oxide nanoparticles were generated by excimer (ArF) laser assisted chemical vapor deposition from WF6/H-2/O-2/Ar gas mixtures. The deposited particles were characterized by X-ray diffraction, X-ray photoelectron spectroscopy, and transmission electron microscopy. The deposition rate as a function of the partial pressures of the reactants and of the laser fluence was measured by X-ray fluorescence spectroscopy. The mean diameter of the deposited tungsten oxide particles varied with the experimental parameters and was typically 23 nm. Particles with a higher degree of crystallinity were observed at a laser fluence exceeding 130 mJ/cm(2), and X-ray amorphous particles were obtained below 110 mJ/cm(2). The amorphous tungsten oxide had a stoichiometry ranging from WO2.7 to WO3. Deposits were formed only when hydrogen was present in the gas mixture. (c) 2005 Elsevier B.V. All rights reserved.