Microspike-arrays were fabricated by irradiating a femtosecond laser on a tungsten surface through a mask opening in air. The natural logarithms of the calculated intensity distributions diffracted at the edge of the mask opening were qualitatively consistent with the experimental results of the shape and arrays of microspikes fabricated. The shape and the array of microspikes depend on the intensity distribution diffracted at the edge of the mask opening. This microspike-array has the potential to be used as a source of micro emitter tips. (c) 2005 Elsevier B.V. All rights reserved.