We explored the real-time formation of periodic surface patterning resulting from laser-driven photochemical deposition in liquid solutions. Using the photochemical deposition of chromium hydroxide layers driven by a continuous wave (cw) Ar+ laser in an acidic potassium chromate solution, we analyzed the kinetics of three different types of patterning: dot array, periodic line writing and holographic grating formed by interfering two beams. In each case, the measured growth laws of the deposited films show the emergence of scaling regimes. This kinetic control, the versatility in monitoring the geometry of laser/medium interaction, and the flexibility of this approach offer valuable developments for substrate patterning for lithographic and holographic applications. (c) 2005 Elsevier B.V. All rights reserved.