화학공학소재연구정보센터
Applied Surface Science, Vol.248, No.1-4, 231-237, 2005
Laser-induced modification of glass-ceramics microstructure and applications
The laser-induced modifications in two kinds of glass-ceramics (M) with composition TiO2-SiO2 (Sitall ST-50) and Li2O-SiO- SiO2 (Fotoform) were investigated for fabricating optical elements. The laser-induced change of refractive index and surface relief constituted the first step of this task. The second stage was a chemical processing including ion exchange (Li <-> Na, K, Rb, for "Fotoform" M) and etching of irradiated and non-irradiated areas. As a result of the above-mentioned processes, mini- and micro-optical components based on two GCs have been fabricated: lenses and lens arrays, waveguides and other waveguiding components, diffractive gratings, etc. (c) 2005 Elsevier B.V. All rights reserved.