화학공학소재연구정보센터
Applied Surface Science, Vol.252, No.1, 57-60, 2005
Laboratory LPP EUV reflectorneter working with non-polarized radiation
A laboratory extreme ultraviolet reflectometer (EUVR) for the wavelength range from 10 to 16 nm was built at IWS Dresden using a gold target laser pulse plasma (Au-LPP) source. The peak reflectance and the center wavelength are reproduced in relative standard deviation of 0.2 and 0.02%, respectively. In contrast to measurements using linearly polarized s-adjusted synchrotron radiation at PTB, measurements with non-polarized radiation at the EUVR yield systematically lower values for the reflectance due to the smaller reflectance of the p-component at higher angles of incidence. (c) 2005 Elsevier B.V. All rights reserved.