Highly textured bismuth oxide (Bi2O3) thin films have been prepared using anodic oxidation of electrodeposited bismuth films onto stainless steel substrates. The Bi2O3 films were uniform and adherent to substrate. The Bi2O3 films were characterized for their structural and electrical properties by means of X-ray diffraction (XRD), electrical resistivity and dielectric measurement techniques. The X-ray diffraction pattern showed that Bi2O3 films are highly textured along (111) plane. The room temperature electrical resistivity of the Bi2O3 films was 10(5) Omega cm. Dielectric measurement revealed normal oxide behavior with frequency. (c) 2005 Elsevier B.V. All rights reserved.