A three-dimensional model based on Monte-Carlo and Finite Elements techniques has been used for simulating plume behavior, 'micron-sized particles' movement and interaction with obstacles in a Pulsed Laser Deposition with Plasma Reflection (PLD/PR) system. Have been investigated the influences of mass, surface size and emission time on trajectory and film surface quality as well. Droplet and 'big-size particles' deposition statistics are presented and a comparison between theoretical and experimental results upon thin film surface quality as well. One can observe that particles mass and surface size have a strong influence on the particles trajectory by affecting the collisions parameters during the entire propagation process. The emission time should influence the particles trajectory by affecting the probability of interaction with other particles. By making a 10,000 particles statistic for a normal distribution of these investigated parameters, we obtain reasonable good results in modeling 'big-size particles' tendency to be deposited at lower reflection angles. These results sustain assumption of 'big particles' deflection by plume fine particles during the propagation process. (c) 2005 Elsevier B.V. All rights reserved.