The L1(0) CoPt films with (0 0 1) preferred orientation are achievedby fabricating on the glass substrates and post annealing at 600 degrees C for 30 min. The preferred orientation of [ZrO2/CoPt](n)/Ag films dependence of the Ag underlayer thickness, ZrO2 and CoPt interlayer thickness is investigated. A large perpendicular magnetic anisotropy and a nearly perfect L1(0) CoPt (0 0 1) texture are obtained in the [ZrO2 (3 nm)/CoPt (5 nM)](3)/Ag (10 nm) film. The existence of ZrO2 plays an important role in reducing the intergranular interactions and in determining the size of CoPt grains. Magnetic reversal in textured CoPt films are close to a Stoner-Wolfarth rotation. (c) 2006 Elsevier B.V. All rights reserved.