This paper presents the use of the simple annealing technique at 1000 degrees C to produce the helical nanostructures of SiOx. We have employed the Co-coated Si substrates, with Co layer and Si substrate utilized as catalyst and Si source, respectively. Beside the ordinary straight nanowires, the helical nanowires such as nanosprings and nanorings were observed. The product was an amorphous structure of SiOx. We have discussed the possible growth mechanism. Photoluminescence spectrum of the SiOx nanostructures showed a blue emission at 428 nm and a green emission at 534 um, respectively. (c) 2006 Elsevier B.V. All rights reserved.