Applied Surface Science, Vol.253, No.10, 4816-4817, 2007
Comment on Lihua Liu et al. "Preparation of boron carbon nitride thin films by radio frequency magnetron sputtering" [Appl. Surf. Sci. 252 (2006) 4185-4189] - Reply by Liu et al.
The experimental results indicate that the composition of our samples is homogeneous. We have explained the reason why the composition of the BCN film is influenced by the r.f. power. The Fourier transformed infrared (FTIR) and X-ray photoelectron spectroscopy (XPS) measurements suggest that the samples are atomic-level hybrids of B, C and N. (c) 2006 Elsevier B.V. All rights reserved.