High current pulsed electron beam (HCPEB) surface treatment of 316L stainless steel (SS) was carried out with a wide spectrum of treating parameters. Microstructure changes occurring in the modified surface were characterized with microscopy, X-ray diffractometry and electron backscatter diffractometry (EBSD) techniques. The evolution regularities of surface craters and microstructure refinement, as well as preferred orientation of (1 1 1) crystal planes were discussed on considering the coupled temperature-stress fields formed in surface layers after an absorption of HCPEB energy. (C) 2006 Elsevier B.V. All rights reserved.