Lanthanum-based thin films deposited on the phosphonate 3-aminopropyltriethoxysilane (APTES) self-assembled monolayer (SAM) were prepared on the hydroxylated glass substrate by a self-assembling process from specially formulated solution. Chemical compositions of the films and chemical state of the elements were detected by X-ray photoelectron spectrometry (XPS). The thickness of the films was determined with an ellipsometer, while the morphologies of the original and worn surfaces of the samples were analyzed by means of atomic force microscopy (AFM) and scanning electron microscopy (SEM), respectively. The tribological properties of the films sliding against GCr15 steel ball were evaluated on a UMT-2MT reciprocating friction and wear tester. As the results, the target film was obtained and reaction may have taken place between the film and the glass substrate. The tribological results show that lanthanum-based thin films are superior in reducing friction and resisting wear compared with APTES-SAM and phosphorylated APTES-SAM. SEM observation of the morphologies of worn surfaces indicates that the wear of APTESSAM and the phosphorylated APTES-SAM is characteristic of brittle fracture and severe abrasion. Differently, slight abrasion and micro-crack dominate the wear of lanthanum-based thin films. The superior friction reduction and wear resistance of lanthanum-based thin films are attributed to the enhanced load-carrying capacity of the inorganic lanthanum particles in the lanthanum-based thin films as well as good adhesion of the films to the substrate. (c) 2007 Elsevier B.V. All rights reserved.