화학공학소재연구정보센터
Advanced Materials, Vol.5, No.2, 81-87, 1993
GROWTH OF GAAS AND ALGAAS BY CHEMICAL BEAM EPITAXY - PRECURSOR REQUIREMENTS AND RECENT DEVELOPMENTS
Semiconductor layers of gallium arsenide and aluminum gallium arsenide are finding increasing application in photonic (solar cells, LEDs, ets.) and microwave (e.g. HEMTs) devices. The ultra-high vacuum technique ''chemical beam epitaxy'' (see Figure) can be effectively used to produce such layers. The method and its competitors are compared.