화학공학소재연구정보센터
Advanced Materials, Vol.5, No.3, 212-213, 1993
ATOMIC LAYER PASSIVATION OF GAAS-SURFACES USING INP RELATED-COMPOUNDS
Passivation of GaAs surfaces has the important function of reducing the loss of carriers by recombination at surfaces and interfaces. This prevents degradation of the characteristics of minority-carrier injection devices and extends the device lifetime. The new method of surface passivation reported here-the deposition of a few atomic layers of InP related compounds-can replace the far from satisfactory sulfur treatment used so far.