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Advanced Materials, Vol.10, No.15, 1277-1277, 1998
High-resolution and low-voltage SEM imaging and chemical microanalysis
Research News: Simple direct surface imaging of bulk samples at a resolution of 0.5 nm or better is possible in the scanning electron microscope (SEM) described here, which integrates a high-brightness field emission gun and a high-resolution condenser-objective immersion lens. The Figure shows high-resolution surface details of a carbon fiber, which could only be visualized accurately at very low voltages (<1 kV).