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Advanced Materials, Vol.14, No.7, 535-535, 2002
Siloxane-based hybrid glass materials for binary and grayscale mask photoimaging
Hybrid (organic-inorganic) glass materials, synthesized by the hybrid sol-gel method, are demonstrated to have potential for fabrication of micro-optical and opto-mechanical structures by UV patterning in a single step. The Figure, an SEM image, shows a microlens array photolithographically patterned in hybrid glass material using a grayscale photomask.