Three-dimensional (3D) aligned carbon nanotube arrays can be controllably fabricated at high resolution by pyrolysis of iron phthalocyanine under Ar/H-2 at 950degreesC. The difference of growth rate of the nanotubes between the catalyst region and the bare substrate surface results in formation of the 3D nanotube arrays (see Figure). This opens the way for fabricating 3D nanotube micropatterns and novel nanoelectronic devices.