화학공학소재연구정보센터
Advanced Materials, Vol.16, No.4, 291-291, 2004
Magnetic ceramic films from a metallopolymer resist using reactive ion etching in a secondary magnetic field
Magnetic ceramic films containing metal-rich nanoworm reticulations 200-550 nm wide have been fabricated from a highly metallized metallopolymer resist (see Figure) using oxygen or hydrogen plasma reactive ion etching in a secondary magnetic field. Applications may be found in spintronics and logic circuits.