Directed self-assembly of silica nanoparticles into ID grooves (see Figure) and 2D holes has been demonstrated. Large-area nanometer-scale-patterned surfaces were defined utilizing interferometric lithography. The particle dimensions and the nanopatterned structures were as small as 50 nm. The final particle distribution depends on the pattern dimensions and symmetry as well A as on spin speed, pH of the colloidal suspension, and particle size.