Thin TiO2 films were produced on different supports (quartz, silicon, plexiglas plates, stainless steel mesh) by controlled hydrolysis of TiOSO4 at 80degreesC. The influence of TiOSO4 concentration in the range of 0.003-0.04 M and concentration of H2SO4 in the range of 0.002-0.04 M on the kinetics of the TiO2 film growth was investigated. It was found that typical kinetics of TiO2 film growth follows the sigma type and the delay time tau(ind) depends on the reagent concentrations. The existence of induction period could result from the process of nucleation of hydrated titanium oxide molecules with formation of heterogeneous colloidal metatitanic acid TiO2.xH(2)O. Analysis of the kinetics was performed including the autocatalytic stage of colloidal metatitanic acid formation.