Sputter deposited lithium nickel vanadate thin films are investigated as a possible anode for lithium microbatteries. As-deposited films showed almost amorphous characteristics, but included a small amount of crystalline phase. The electrochemical behavior of thin-film electrodes exhibits consistent voltage charge curves for the first and subsequent cycles, and excellent cycling performance, which are different from the results obtained with bulk electrodes. These characteristics and a high specific capacity make lithium nickel vanadate thin films very attractive candidates for lithium rechargeable microbattery anodes. (C) 2002 The Electrochemical Society.