화학공학소재연구정보센터
Advanced Functional Materials, Vol.15, No.9, 1511-1516, 2005
Conductive SU8 photoresist for microfabrication
A conductive composite photoresist has been developed for the direct photpatterning of electrodes. It is based on a dispersion of silver nanoparticles in SU8, a non-conductive, negative-tone photoresist. Manufactured structures have an electrical conductivity at a low silver content of around 6 vol.-%.