화학공학소재연구정보센터
Advanced Functional Materials, Vol.16, No.10, 1324-1330, 2006
The elastic properties and plastic behavior of two-dimensional polymer structures fabricated by laser interference lithography
The elastic and plastic properties within a two-dimensional polymer (SU8) structure with sixfold symmetry fabricated via interference lithography are presented. There is a nonuniform spatial distribution in the elastic modulus, with a higher elastic modulus obtained for nodes. (brightest regions in the laser interference pattern) and a lower elastic modulus for beams (darkest regions in the laser interference pattern) of the photopatterned films. We suggest that such a nonuniformity and unusual plastic behavior are related to the variable material properties "imprinted" by the interference pattern.