Semifluorinated azobenzene liquid-crystalline side-chain polymers with different perfluoroalkyl lengths are used to develop surface relief gratings (SRGs). With sufficient fluorinated side-chain lengths, surface relief gratings could be completely sup-assembled liquid-crystalline order at the surface. This indicates that there is a surface-dependent nature pressed due to the self to SRG formation. The SRG formation from the semifluorinated azobenzene liquid-crystalline side-chain polymers is compared to methoxy-terminated azobenzene side-chain polymers, and results show that the perfluoroalkyl-azobenzene polymers require a longer formation time than the methoxy-terminated polymers.