dFerroelectric thin films of sol-gel-derived Pb(Zr-x, Ti1-x)O-3 (lead-zirconate-titanate, PZT) were obtained by the low-temperature processing employing oxygen-plasma treatment. The as-coated PZT films were annealed in oxygen ambience at 450 degreesC, followed by oxygen-plasma treatment at 200 degreesC, which gave rise to the ferroelectric hysteresis. Annealing of the as-coated PZT films followed by oxygen-plasma teratment at 200 degreesC gave rise to the ferroelectric hysteresis. (C) 2002 Elsevier Science B.V. All rights reserved.