An electron cyclotron wave resonant methane plasma discharge was used for the high rate deposition of hydrogenated amorphous carbon (a-C:H). Deposition rates of up to similar to400 Angstrom/min were obtained over substrates up to 2.5 in. in diameter with a film thickness uniformity of similar to+/-10%. The deposited films were characterised in terms of their mass density, sp(3) and hydrogen contents, C-H bonding, intrinsic stress, scratch resistance and friction properties. The deposited films possessed an average sp(3) content, mass density and refractive index of similar to58%, 1.76 g/cm(3) and 2.035 respectively. Mechanical characterisation indicated that the films possessed very low steady-state coefficients of friction (ca. 0.06) and a moderate shear strength of similar to141 MPa. Nano-indentation measurements also indicated a hardness and elastic modulus of similar to16.1 and 160 GPa respectively. The critical loads required to induce coating failure were also observed to increase with ion energy as a consequence of the increase in degree of ion mixing at the interface. Furthermore, coating failure under scratch test conditions was observed to take place via fracture within the silicon substrate itself, rather than either in the coating or at the film/substrate interface. (C) 2003 Elsevier B.V. All rights reserved.