화학공학소재연구정보센터
Current Applied Physics, Vol.3, No.6, 485-489, 2003
Optimisation of cold cathode ion source model
This paper represents the results of the optimisation of cold cathode ion source model with 5 cm extraction aperture diameter. In this model, the glow discharge is utilised for generation of electrons in the cathode of the ion source. The various models with different lengths of cathode and anode are tested. The shortest model with 4.5 cm in length of cathode and anode each shows satisfactory operation and can be used in cases when the high values of extracted ion current are not required. The best model from the point of view of ion beam current value and efficiency of the discharge is the model with cathode length of 7 cm and anode length of 7 cm. In this case, the obtained maximum ion beam current is 110 mA when the discharge current is 1000 mA. In case when moderate values of extracted ion beam current are necessary, it is possible to operate the ion source even without the anode magnetic system. (C) 2003 Elsevier B.V. All rights reserved.