A new analytical charge model in quantized inversion layer in MOS structure is developed by comprehensively considering the quantum mechanical effects. The model is based on the newly proposed concept of space charge capacitance. Explicit expressions of surface potential and inversion layer carrier density are given which have smooth transition characteristics from depletion to weak to strong inversion regions. Threshold voltage shift, finite inversion layer thickness and the increment of depletion charge after strong inversion are properly modeled. Model results are compared with numerical data by self-consistent solution of Schrodinger and Poisson equation and the high accuracy of the model is demonstrated.