화학공학소재연구정보센터
Solid-State Electronics, Vol.45, No.5, 735-741, 2001
Dielectric loss and related noise of pyroelectric modified lead titanate arrays
Electrical characteristics of pyroelectric modified lead titanate arrays were measured at different temperatures. The modified lead titanate films were deposited by metal-organic decomposition. Dielectric loss tangent (tans) as low as 0.045 at 30 Hz was obtained at room temperature with lanthanum nickel oxide electrodes. For the purpose of this study, micromachined 40 x 40 mum(2) pixels made of 200-nm-thick pyroelectric films were connected in parallel into 10- or 100-pixel arrays. Noise measurements showed the temperature and frequency dependence of tan delta noise to coincide with the calculated results, At room temperature, the best 10-pixel array showed a tan delta noise current as low as 2 x 10(-15) A/Hz(1/2) at the operating frame rate of 30 Hz, As expected, 1/f noise was observed proportional to applied current when the pixels were dc biased.