Short-channel effects of Si1-xGex p-channel MOSFETs have been examined by two-dimensional computer simulation. It is found that devices incorporating SiGe channel offer worthwhile advantages in device performance and scalability. In addition to enhanced drive current due to higher hole mobility, Si1-xGex p-channel MOSFETs also provide better carrier confinement in the Si/SiGe quantum well, which leads to lower gate-controlled depletion charge and electric field in the subsurface. These in turn suppress the drain-induced barrier lowering and punch through effects in SiGe pMOSFETs compared to the bulk Si devices at the same physical dimension. Higher device performance and better scalability make Si1-xGex p-channel MOSFETs a great benefit for high-speed and low-power CMOS circuit applications. (C) 2002 Elsevier Science Ltd. All rights reserved.