This paper describes a design of the electrostatic discharge (ESD) protection device to minimize its area A(p) while maintaining the breakdown voltage V-ESD. Hypothesis tests using measured data were performed to find the severest applied serge condition and to select control factors for the design-of-experiments (DOE). Also, technology CAD (TCAD) was used to estimate V-ESD. An optimum device structure, where salicide block was employed, was found using statistical methods and TCAD. (C) 2002 Elsevier Science Ltd. All rights reserved.