Deep levels spectra DLTS, 77 K photoluminescence (PL) spectra and photosensitivity were measured for GaAsN and InGaAsN films with low N and In concentration grown by molecular beam epitaxy and in GaAs films grown on GaAsN buffer. It is shown that the bandedge luminescence intensity is greatly decreased in GaAsN, GaAs/GaAsN and particularly in InGaAsN structures compared to the homoepitaxial GaAs. Comparison of the DLTS and PL spectra strongly suggests that the main recombination center in such films is the EL3-like electron trap whose concentration greatly increases upon In and N incorporation into the solid solution. Based on published results the trap is associated with substitutional oxygen on As site and the results are discussed in view of such possible assignment. (C) 2002 Elsevier Science Ltd. All rights reserved.