화학공학소재연구정보센터
Solid-State Electronics, Vol.47, No.2, 357-360, 2003
Measurement of noise characteristics of MEMS accelerometers
The noise characteristics of microelectromechanical systems accelerometers at different accelerations are presented. The general experimental results show 1/f-type noise at low frequencies and white Gaussian noise at high frequencies. The magnitude of the noise spectral density is acceleration dependent. The results also show spectral peaks originating from the oscillators inside the accelerometers. (C) 2002 Elsevier Science Ltd. All rights reserved.