Solid-State Electronics, Vol.47, No.3, 533-537, 2003
Pulsed laser deposition of manganese doped GaN thin films
Thin films of GaN doped with manganese were grown on sapphire substrates by pulsed laser deposition. The deposition plasma was characterised using a Langmuir ion probe and the film growth process was monitored in situ using optical reflectometry. The films showed higher Mn concentrations than the target preparations, suggesting a loss of gallium during the growth process. Photoluminescence measurements carried out on pure and doped films showed a quenching of the blue-green luminescence with the inclusion of manganese. (C) 2002 Elsevier Science Ltd. All rights reserved.