화학공학소재연구정보센터
Solid-State Electronics, Vol.49, No.2, 163-166, 2005
InAlAs/InGaAs doped channel heterostructure for high-linearity, high-temperature and high-breakdown operations
High-linearity In0.52Al0.48As/In0.53Ga0.47As doped channel transistor (DCFET) was successfully fabricated by low-pressure metal organic chemical vapor deposition (LP-MOCVD). Due to the presence of doped InGaAs channel, undoped InAlAs barrier layer and low-temperature growth InAlAs buffer layer, good carrier confinement, improved breakdown and a wide transconductance operation regime are expected. Experimentally, for a 1.5 x 100 mum(2) device, high-transconductance of 291 mS/mm, high-gate-drain breakdown voltage of 20.2 V, high-turn-on voltage of 0.78 V, wide operation regime of 288 mA/mm as well as significantly improved gate voltage swing of 1.05 V are achieved. Additionally, the studied device shows good temperature characteristics. The performance indicates the promise for high-power and high-temperature applications. (C) 2004 Elsevier Ltd. All rights reserved.