화학공학소재연구정보센터
Solid-State Electronics, Vol.49, No.7, 1107-1111, 2005
A 3.5 in. QVGA poly-Si TFT-LCD with integrated driver. including new 6-bit DAC
By the SOP (system-on-panel) technology with laser crystallization process, all the driver circuits required for 6-bit color QVGA (320 x RGB x 240) LCD are integrated on panel. The integrated data driver comprises a new ramp-driven 6-bit DAC. The characteristics and uniformity of the LTPS (low temperature polycrystalline silicon) has been remarkably enhanced by applying multi-shot ELA (excimer laser annealing) process and surface treatment. The characteristics of the poly-Si TFTs for integration of driver circuits are following: (1) in NMOS, V-th similar to 1 V and mobility similar to 240 cm(2)/V s, (2) in PMOS, V-th similar to 1.8 V and mobility similar to 100 cm(2)/Vs. (c) 2005 Elsevier Ltd. All rights reserved.