TcO4- in HF solution reacts to form Tc3O9F4- along with some TcO3F. Pure TcO3F is obtained if a mixture of HF/BiF5 is applied. TcO3F dimerizes in the solid state via fluoride bridges, similar to the structures of CrO2F2 and VOF3. TcO3F reacts in HF with AsF5 or SbF5 under formation of TcO2F2+As(Sb)F-6(-).