화학공학소재연구정보센터
Applied Surface Science, Vol.253, No.17, 7192-7196, 2007
Effect of substrate bias voltage on corrosion of TiN/Ti multilayers deposited by magnetron sputtering
Austenitic stainless steel can be attack by localized corrosion in saline environments, such as seawater. TiN/Ti multilayers can improve the corrosion resistance of the stainless steel better than TiN monolayers, because the titanium layers improve the impermeability of TiN/Ti multilayers. In this work, 1.75-4.55 mu m thick layers were deposited on to grounded or -100 V biased substrates of 304 stainless steel substrates by reactive magnetron sputtering. The corrosion resistance of the layers was studied by means of potentiodynamic polarization in 0.5 M NaCl solutions. It was found that the pitting corrosion resistance was dependent on the bias and period number of the multilayers. (c) 2007 Elsevier B.V. All rights reserved.